|
Diamond is the ultimate MEMS substrate material. In the weeks and
months ahead you will hear a lot more about ADT's development of
diamond MEMS devices. Note that we are NOT coating silicon MEMS
devices (although we could), but rather UNCD® is being used as a
structural material and entire electromechanical devices are being
made out of diamond. Our NaDiaProbes™
will give you a peek at what's possible.
If you want to get started making diamond MEMS devices, our UNCD
wafers will get you there. RIE is used to etch the diamond,
and traditional microfabrication techniques can be used for the
photolithography and other microfabrication steps.
Please join our dialogue on diamond MEMS on
The Diamond Revolution.
Questions: Please contact ADT.
|
